AFM image of the diamond like film surface.
The surface roughness is about 5 nm.
Micro-hardness of diamond-like coating samples
RF and VHF PECVD installation with 75 mm diameter deposition surface.
installation equipped by two-sides electrode system with 50×50 cm area.
MAIN COATING FEATURES:
ELECTRONICS, MECHANICAL ENGINEERING,
The technique uses plasma enhanced chemical vapor deposition (PECVD) principles. The developed technique allows obtaining of 0.3 ÷ 2 μm coating by diamond-like carbon (sp3 fraction up to 64%) on silicon, glass, titanium or stainless steel substrates. The achieved film grow rate – 1 nm/sec.
The basic methods of DLC coating has been developed and tested. The large semi-industrial PECVD reactor has been designed and manufactured.
The research team is interested in joint research aimed on adaptation of the developed techniques for “end-user” objects coating. We could also provide a consulting in optimization and development of PECVD processes,
For a well established process with a large volume recovery, the DLC coating costs is about 0.5 EUR/cm2.